maskless

maskless

1. Keywords atomic force microscopy;probe;maskless etching;MEMS;

原子力显微镜;探针;无掩膜腐蚀;微电子机械系统;

2. Harry spots Kingsley fighting a maskless Rookwood.

哈利发现金斯莱正在和没有面罩的卢克伍德战斗。

3. Complex 3-dimension (3D) microstructures can be constructed using this technique with the advantages of being maskless, single step, real 3D structure and high resolution.

我们展示了一个有潜力应用于组织工程及生医领域之新颖的微制造技术-双光子吸收光致聚合法，它所使用之基材为液态高分子材料。

4. Implementation Methods for Amplitude Division Maskless Laser Interference Photolithography

振幅分割无掩模激光干涉光刻的实现方法

5. The beam division method in maskless laser interference photolithography can be divided into wave-front division and amplitude division.

摘要无掩模激光干涉光刻中的分束方法一般有波前分割和振幅分割。

6. maskless lithography

无掩模光刻

7. maskless pattern generation

无掩模图像生成

8. maskless wiring formation technology

无掩模布线形成技术

9. maskless process

无掩模法

10. maskless ion implantation

无掩模离子注入

11. maskless etching

无掩蔽腐蚀

12. The key of this research is studying or producing small amount of the Maskless Technology to taking place of tradition mask, and also fabricate TFT device.

本研究目的在于研发或少量生产得以无光罩微影技术取代传统光罩，并制作出TFT元件。

13. Simulation and experiments show that for point array or hole array patterns with the same sizes maskless interference photolithography is much simple than the traditional photolithography.

模拟和实验结果表明，对点阵或孔阵图形，在同样的图形尺度下，无掩模干涉光刻比传统光刻简单得多。

14. Implementation Methods for Wave-Front Division in Maskless Laser Interference Photolithography

波前分割无掩模激光干涉光刻的实现方法

15. Keywords laser plating;laser etching;maskless plating technique;

激光电镀;激光刻蚀;无屏蔽电镀技术;

16. The method is simple and provides a new way to improve the imaging quality in DMD-based maskless lithography, which is very useful for the fabrication of high-performance microstructure device.

该方法能有效改善面形质量,而且不存在掩模制作等问题, 这对于制作高质量的微结构元件有重要意义。

17. Keywords focusing;defocus signal;maskless lithography;varable-width line;mathematical model;

调焦;离焦信号;无掩膜光刻;可变线宽;数学模型;

18. In recent years, optical maskless lithography technique based on spatial light modulator(SLM) has been attracted wide attentions.

近年来，空间光调制器(SLM)无掩模光刻技术受到微电子及相关领域的广泛关注。